VLSI Design

Lecture 4: CMOS Technology

Crystal Growth, Silicon Ingot, Czochralski crystal puller, Cleanroom, Lithography, Oxidation, Dry or wet oxidation, duration of oxidation, Diffusion, Epitaxy, Ion-implantation, Annealing, Metallization, CMOS Fabrication Sequence, Design rules, Twin-well process, Silicon On Insulator (SOI).

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Lecture 3: Deep-Submicron MOSFET operation (Prev Lesson)
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